Products

Semicorex CVD SiC-coated upper ground rings are the essential ring-shaped components engineered specially for the sophisticated plasma etching equipment. As the industry-leading supplier of semiconductor components, Semicorex focuses on delivering high-quality, long-lasting and ultra-clean CVD SiC-coated upper ground rings to help our valued customers improve operational efficiency and overall product quality.

Semicorex solid CVD SiC rings are high-performing ring-shaped components mainly used in the reaction chambers of plasma etching equipment in the advanced semiconductor industry. Semicorex solid CVD SiC rings undergo strict material selection and quality control, offering unparalleled material purity, exceptional plasma corrosion resistance and consistent operational performance.

Semicorex SiC Seals are high-performance mechanical face components engineered to provide superior wear resistance, thermal stability, and universal chemical inertness in the most demanding rotating equipment environments. Semicorex is a professional SiC ceramic material provider, which can supply the high-precision products for global customers.*

Semicorex SiC Pedestal is a high-precision, multi-functional hardware component designed to provide the thermal stability and intricate fluid distribution required for advanced microchannel reaction systems. Semicorex specializes in the engineering and supply of these high-purity SiC pedestals according to customers’ needs.*

Semicorex SiC-coated graphite jigs are the essential graphite components covered with a dense and uniform SiC coating. Combined with excellent properties of both graphite and silicon carbide, Semicorex SiC-coated graphite jigs perform reliably under the complex semiconductor packaging and testing conditions.

Semicorex SiC Ceramic Vacuum Chuck is manufactured from high-purity Sintered Dense Silicon Carbide (SSiC), are the definitive solution for high-precision wafer handling and thinning, providing unparalleled stiffness, thermal stability, and sub-micron flatness. Semicorex are keen to provide the high quality and cost efficient products for worldwide customers.*