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SiC-coated planetary susceptors

Semicorex SiC-coated planetary susceptors are the high-precision graphite supporting components covered with a dense silicon carbide coating, specially engineered for the advanced MOCVD equipment. They can enable uniform gas flow and thermal distribution, thus contributing to creating an optimal epitaxial environment.

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SiC-Coated Gas Diversion Discs

Semicorex SiC-coated gas diversion discs are the indispensable graphite components applied in the semiconductor epitaxial equipment, engineered specially to regulate reaction gas flow and promote uniform gas distribution within the reaction chamber. Choose Semicorex, choose the optimal gas diversion solutions for high-quality wafer epitaxial results.

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CVD SiC-coated upper ground rings

Semicorex CVD SiC-coated upper ground rings are the essential ring-shaped components engineered specially for the sophisticated plasma etching equipment. As the industry-leading supplier of semiconductor components, Semicorex focuses on delivering high-quality, long-lasting and ultra-clean CVD SiC-coated upper ground rings to help our valued customers improve operational efficiency and overall product quality.

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SiC-Coated Graphite Jigs

Semicorex SiC-coated graphite jigs are the essential graphite components covered with a dense and uniform SiC coating. Combined with excellent properties of both graphite and silicon carbide, Semicorex SiC-coated graphite jigs perform reliably under the complex semiconductor packaging and testing conditions.

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CVD SiC-Coated Furnace Tubes

Semicorex CVD SiC-coated furnace tubes are the high-end tubular components specifically manufactured for the high-temperature semiconductor processing,such as oxidation, diffusion, and annealing of semiconductor wafers. Leveraging advanced processing technologies and mature manufacturing experience, Semicorex is committed to supplying the precision-machined CVD SiC-coated furnace tubes with market-leading quality for our valued customers.

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SiC-coated Graphite Plates

Semicorex SiC-coated Graphite Plates are high-purity carriers specifically engineered for the rigorous demands of SiC and GaN epitaxy, utilizing a dense CVD Silicon Carbide coating on an isostatic graphite substrate to provide a stable, chemically inert thermal barrier for high-yield wafer processing. Semicorex supplies qualified products and service for global customers.*

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