Products

Semicorex CVD SiC-coated wafer boats are the high-precision ceramic carrying tools made of ultra-high-purity silicon carbide, featuring high reliability, excellent cleanliness and extended service life. Serving as the ideal solution for wafer thermal processing, Semicorex CVD SiC-coated wafer boats can achieve secure and stable positioning of wafers during transfer and processing stages.

Semicorex CVD SiC Fin is a thick, high-density solid silicon carbide component manufactured by Chemical Vapor Deposition, designed for plasma-facing and ultra-high-temperature semiconductor applications requiring exceptional purity, durability, and corrosion resistance. Semicorex supplies advanced CVD silicon carbide components to semiconductor equipment manufacturers worldwide, providing customized solutions, precision engineering, and dependable global delivery for the most demanding process environments.*

Made from high-performance CVD SiC materials, Semicorex CVD SiC focus ring for 2L10-506419-21 is the crucial ring part sengineered specially for TEL VIGUS RK4 equipment used in the precision semiconductor etching processes. Choosing Semicorex means you will obtain the ideal CVD SiC solutions to achieve precise and uniform etching results.

Semicorex CVD SiC-coated upper ground rings are the essential ring-shaped components engineered specially for the sophisticated plasma etching equipment. As the industry-leading supplier of semiconductor components, Semicorex focuses on delivering high-quality, long-lasting and ultra-clean CVD SiC-coated upper ground rings to help our valued customers improve operational efficiency and overall product quality.

Semicorex solid CVD SiC rings are high-performing ring-shaped components mainly used in the reaction chambers of plasma etching equipment in the advanced semiconductor industry. Semicorex solid CVD SiC rings undergo strict material selection and quality control, offering unparalleled material purity, exceptional plasma corrosion resistance and consistent operational performance.

Semicorex CVD SiC-coated furnace tubes are the high-end tubular components specifically manufactured for the high-temperature semiconductor processing,such as oxidation, diffusion, and annealing of semiconductor wafers. Leveraging advanced processing technologies and mature manufacturing experience, Semicorex is committed to supplying the precision-machined CVD SiC-coated furnace tubes with market-leading quality for our valued customers.