Planetary Susceptor

Semicorex Planetary Susceptor is an indispensable component for semiconductor epitaxy reactors, specifically engineered for Aixtron G5+ equipment. Constructed from high-purity graphite and coated with silicon carbide (SiC), this susceptor guarantees superior thermal stability, exceptional chemical resistance, and unparalleled performance in high-temperature environments.

The Aixtron G5+ epitaxy reactor stands as a benchmark in the industry for GaN, SiC, and other compound semiconductor growth processes. The planetary susceptor is pivotal in optimizing gas flow, ensuring precise wafer rotation, maintaining exact temperature control, and achieving uniform deposition of epitaxial layers. Its innovative design significantly enhances process repeatability, making it the ideal choice for high-volume production environments.

Key Features  

- Advanced Material Composition: Made from high-purity graphite with a SiC coating, providing enhanced durability and resistance to harsh process conditions.  

- Optimized Thermal Performance: Ensures uniform heat distribution, critical for high-precision epitaxial layer growth.  

- Chemical Resistance: The SiC coating prevents graphite oxidation, extending the lifespan of the susceptor and maintaining process purity.  

- Precision Engineering: Designed to meet the stringent requirements of Aixtron G5+ systems, ensuring seamless integration and optimal reactor efficiency.  

- High Surface Uniformity: Minimizes particle contamination, supporting superior wafer quality and higher yield in semiconductor manufacturing.  

Advantages of Our Planetary Susceptor  

- Extended Service Life: The SiC coating significantly reduces wear and tear, resulting in lower replacement frequency and reduced operational costs.  

- Improved Process Stability: Ensures consistent heating and minimal thermal gradients, leading to high-quality wafer production.  

- Compatibility & Customization: Available in standard and customized designs to meet specific Aixtron G5+ process requirements.  

Graphite parts play an indispensable and very important role in the semiconductor process. The quality of graphite materials has a great impact on the quality of finished products. Our graphite batch consistency and material homogeneity can be controlled and guaranteed through the production process.

1. Small batch production, the carbonization furnace only uses a small furnace with only 50 cubic meters

2. Each piece of material is monitored and tracked

3. Multi-point temperature monitoring in the furnace space to ensure that the temperature difference is kept in a very small range

4. Multi-point temperature monitoring on the material to ensure that the temperature difference is kept in a very small range

Semicorex Planetary Susceptor is the premium solution for Aixtron G5+ reactors, offering outstanding thermal stability, chemical resistance, and precision performance. Engineered for the most demanding semiconductor manufacturing processes, it drives higher wafer yields, minimizes contamination risk, and extends equipment lifespan. Upgrade your epitaxy system with a top-tier susceptor for unmatched results.