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Precision ceramic components in semiconductor

Precision ceramic parts are key components of core equipment in key processes of semiconductor manufacturing, such as photolithography, etching, thin film deposition, ion implantation, CMP, etc., such as bearings, guide rails, liners, electrostatic chucks, mechanical handling arms, etc.

Semiconductor Showerheads

The surface of the gas distribution plate features hundreds or even thousands of tiny, precisely arranged holes, resembling a finely woven neural network.

Disc Ceramic Membranes

As a new separation technology, the core of ceramic membrane filtration equipment is the ceramic membrane (filter element).

Introducing Alumina Material

Alumina ceramic components have excellent properties such as high hardness, high mechanical strength, super wear resistance, high temperature resistance, high resistivity, and good electrical insulation performance.

Silicon Carbide power device industry

Power semiconductors (also known as power electronic devices) are core components for power conversion and circuit control in electronic devices.

Ceramic Heaters

In the front-end process (FEOL) of semiconductor manufacturing, the wafer needs to be subjected to various process treatments, especially the wafer needs to be heated to a certain temperature, and there are strict requirements, because the uniformity of temperature has a very important impact on the......

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