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Ceramic Vacuum Chucks

Ceramic vacuum chucks are tools used for clamping and carrying semiconductor wafers in semiconductor wafer manufacturing. They feature high flatness and parallelism, dense and uniform structure, high strength, good air permeability, uniform adsorption force, and ease of trimming. They are suitable f......

Optimization of thermal field design for SiC epitaxial furnace (hot-wall CVD reactor)

The core objective is to achieve wafer surface temperature uniformity (≤±0.5–5℃) and temperature/flow field stability, thereby improving epitaxial layer thickness uniformity (<3%), doping uniformity (<8%), reducing defect density, and increasing growth rate (>60 μm/h).

Key technologies of carbon/carbon composite materials

C/C composites possess numerous excellent properties and are currently the only composite materials capable of operating at high temperatures above 2600°C in inert atmospheres, making them widely applicable in aerospace, weaponry, nuclear energy, metallurgy, and chemical industries.

Brief Introduction to SiC Wafer Fabrication Process

As the indispensable substrate material in the cutting-edge semiconductor industry, silicon carbide wafers exhibit excellent thermal and electrical properties, boasting broad application prospects in high-temperature, high-frequency, high-power and radiation-resistant integrated electronic devices.

Carbon Fiber Thermal Insulation Material

The combination of soft felt and rigid/rigidized felt essentially involves balancing three things: heat conduction (solid/gas phase), radiative heat transfer, and structure and assembly. Focusing on only one indicator (such as the lowest high-temperature thermal conductivity) will usually lead to pr......

Properties and Semiconductor Applications of Silicon Carbide Ceramics

Silicon carbide ceramic are the advanced ceramic material that consists primarily of carbon and silicon. Featuring outstanding performance characteristics, silicon carbide ceramic is extensively used in the high-end industries including mechanical machining, semiconductor manufacturing, military ind......

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