Ceramic vacuum chucks are made of porous ceramic materials with uniform pore size distribution and internal interconnection. After grinding, the surface is smooth and delicate with good flatness. They are widely used in the manufacturing of semiconductor wafers such as silicon, sapphire, and galli......
Read MoreWafer selection has a significant impact on the development and manufacturing of semiconductor devices. Wafer selection should be guided by the requirements of specific application scenarios, and should be carefully evaluated using the following crucial metrics.
Read MoreDry etching equipment uses no wet chemicals for etching. It primarily introduces a gaseous etchant into the chamber through an upper electrode with tiny through-holes. The electric field generated by the upper and lower electrodes ionizes the gaseous etchant, which then reacts with the material to b......
Read MoreAs a representative of third-generation semiconductor materials, silicon carbide (SiC) boasts a wide bandgap, high thermal conductivity, high breakdown electric field, and high electron mobility, making it an ideal material for high-voltage, high-frequency, and high-power devices. It effectively ove......
Read MoreOxidation process refers to the process of providing oxidants (such as oxygen, water vapor) and thermal energy onsilicon wafers, causing a chemical reaction between silicon and the oxidants to form a protective silicon dioxide (SiO₂) film.
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