Ignition Injector

Semicorex Ignition Injector, or Quartz Ignition Reactor, is an engineered component intended to enable high-purity chemical processes that require ignition or initiation of reaction. Made of fused quartz, the Ignition Injector combines the best properties of fused quartz (thermal stability, chemical resistance and tolerance for structural inaccuracies) to provide predictable usage in semiconductor and research applications. Use of the Ignition Injector is essential in those processes that permit the ignition of gases vapours or reactive compounds with no possibility of contamination in order to provide safety and accuracy in extreme applications.

Quartz was selected for the Ignition Injector on the grounds that quartz provides the highest levels of purity and inertness as a material. Metals and conventional ceramics may be of high purity, but they are not inert and may introduce trace contaminates, therefore, it is difficult to conduct sensitive processes without the possibility of contamination or alter analytical observations. Quartz is widely regarded as an ideal material when thermal shock can be tolerated, particularly for ignition environments where rapid temperature changes can be expected due to unexpected ignition conditions. Equally important; quartz survives aggressive chemicals to prevent interference or damage due to corrosive gases or energy from the reaction in a long-term use environment.

The Ignition Injector is designed to serve as a localized reaction zone, providing a clean and controlled environment for creating combustion or plasma-based reactions. This is useful in the semiconductor manufacturing sector, wherein ignition reactors may need to activate precursor gases, decompose complex chemical species or initiate plasma-assisted cleaning steps. The cleanliness of the reactor walls guarantees that unwanted secondary reactions between the chamber and reactants may not negatively influence the reaction and thus can provide accurate control of the chemical reaction. The optical transparency of quartz provides real time optical monitoring capabilities to observe the reaction zone, completely unobscured, which is advantageous in experimental work or production.

Along with chemical and thermal elements, the Ignition Injector is favored because of its faciliation in precisely manufactured objects. As the component is manufactured dimensions with high toleranc, it can also readily fit directly into reactors and integrate with existing systems or be made to be appropriate for the arrangement for a specific tool or tools. The non-porous smooth surfaces of the inner quartz reactor are beneficial in reducing particle attachment for easy cleaning, as the layers of material attached to the inner surfaces of the chamber will be consistent cycle after cycle due to the reusability of the component. It helps in reducing costs and and improving efficiencies of processes, which is highly relevant to high volume manufacturing operations.