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EPI 3 1/4

EPI 3 1/4" Barrel Susceptor

Semicorex SiC coating EPI 3 1/4" Barrel Susceptor provides excellent thermal stability and resistance to chemical attack, while the graphite substrate offers superior heat transfer properties.

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Product Description

Semicorex EPI 3 1/4" barrel susceptor is a high-quality graphite product coated with high-purity SiC, offering exceptional heat and corrosion resistance. It is specifically designed for LPE applications in the semiconductor manufacturing industry.

Our EPI 3 1/4" Barrel Susceptors are designed for use in a variety of industries, including aerospace, automotive, and electronics. We are committed to providing high-quality products at a competitive price, and we are dedicated to building long-term relationships with our customers. Contact us today to learn more about our SiC-coated graphite crucibles and how they can benefit your business.


Parameters of EPI 3 1/4" Barrel Susceptor

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase

Density

g/cm ³

3.21

Hardness

Vickers hardness

2500

Grain Size

μm

2~10

Chemical Purity

%

99.99995

Heat Capacity

J·kg-1 ·K-1

640

Sublimation Temperature

2700

Felexural Strength

MPa (RT 4-point)

415

Young’ s Modulus

Gpa (4pt bend, 1300℃)

430

Thermal Expansion (C.T.E)

10-6K-1

4.5

Thermal conductivity

(W/mK)

300


Features of EPI 3 1/4" Barrel Susceptor

SiC coating provides excellent thermal stability and resistance to chemical attack

Graphite substrate offers superior heat transfer properties

High density and hardness

High chemical purity

High heat capacity

High sublimation temperature

High flexural strength

High Young's modulus

Low thermal expansion coefficient

High thermal conductivity




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