SiC Coated Barrel Susceptor

Semicorex is a large-scale manufacturer and supplier of SiC Coated Barrel Susceptor in China. We focus on semiconductor industries such as silicon carbide layers and epitaxy semiconductor. Our products have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

Send Inquiry

Product Description

Semicorex SiC Coated Barrel Susceptor is a high purity SiC coated graphite carrier, using in the process to grow the epitaxial layer on the wafer chip, which is suitable for many epitaxial reactors. It has high heat and corrosion resistance, which has great stability in extreme environment.
Our SiC Coated Barrel Susceptor is also resistant to high-temperature oxidation and corrosion, making it a reliable and durable product. Its high melting point ensures that it can withstand the high-temperature environment required for efficient semiconductor manufacturing.
Contact us today to learn more about our SiC Coated Barrel Susceptor.

Parameters of SiC Coated Barrel Susceptor

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300