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SiC Coated Barrel Susceptor
  • SiC Coated Barrel SusceptorSiC Coated Barrel Susceptor
  • SiC Coated Barrel SusceptorSiC Coated Barrel Susceptor
  • SiC Coated Barrel SusceptorSiC Coated Barrel Susceptor
  • SiC Coated Barrel SusceptorSiC Coated Barrel Susceptor
  • SiC Coated Barrel SusceptorSiC Coated Barrel Susceptor

SiC Coated Barrel Susceptor

Semicorex is a large-scale manufacturer and supplier of SiC Coated Barrel Susceptor in China. We focus on semiconductor industries such as silicon carbide layers and epitaxy semiconductor. Our products have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

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Product Description

Semicorex SiC Coated Barrel Susceptor is a high purity SiC coated graphite carrier, using in the process to grow the epitaxial layer on the wafer chip, which is suitable for many epitaxial reactors. It has high heat and corrosion resistance, which has great stability in extreme environment.
Our SiC Coated Barrel Susceptor is also resistant to high-temperature oxidation and corrosion, making it a reliable and durable product. Its high melting point ensures that it can withstand the high-temperature environment required for efficient semiconductor manufacturing.
Contact us today to learn more about our SiC Coated Barrel Susceptor.


Parameters of SiC Coated Barrel Susceptor

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase

Density

g/cm ³

3.21

Hardness

Vickers hardness

2500

Grain Size

μm

2~10

Chemical Purity

%

99.99995

Heat Capacity

J·kg-1 ·K-1

640

Sublimation Temperature

2700

Felexural Strength

MPa (RT 4-point)

415

Young’ s Modulus

Gpa (4pt bend, 1300℃)

430

Thermal Expansion (C.T.E)

10-6K-1

4.5

Thermal conductivity

(W/mK)

300


Features of SiC Coated Barrel Susceptor

- Avoid peeling off and ensure coating on all surface

High temperature oxidation resistance: Stable at high temperatures up to 1600°C

High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.

Corrosion resistance: high hardness, dense surface and fine particles.

Corrosion resistance: acid, alkali, salt and organic reagents.

- Achieve the best laminar gas flow pattern

- Guarantee evenness of thermal profile

- Prevent any contamination or impurities diffusion




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