8-inch Waferholder Rings

Semicorex 8-inch Waferholder Rings are cutting-edge semiconductor processing hardware intended to secure and support silicon wafers safely through important thermal, etching, and deposition processes. Constructed from high-quality graphite with a dense coating of silicon carbide (SiC) for added strength, the wafer holder ring yields superior thermal stability, chemical resistance, and mechanical strength, rendering it ideal for use in high-temperature and corrosive environments such as CVD (Chemical Vapor Deposition), PECVD, and epitaxy systems.

Key Features:

Material Composition:

The substrate material is high-purity graphite, which is selected for high thermal conductivity and structural homogeneity. High density and uniform silicon carbide (SiC) film coating is applied on the surface, exhibiting high resistance to oxidation and chemical attack even at elevated temperatures in excess of 1000°C. The mixture contains a shelf life of long duration and minimal risk of contamination of the wafers.

Secure Wafer Positioning

Designed particularly to hold 8-inch (200 mm) wafers, the waferholder ring holds precise tolerances and an optimally designed inner geometry to securely grip the wafer. The ring remains stable in position during thermal cycling and gas flow, minimizing micro-movement that could lead to particle creation or wafer breakage.

Thermal Uniformity:

The inherent thermal conductivity of the graphite substrate and the stability of the SiC coating ensure consistent heat transfer over the wafer surface. This results in consistent process results, reduced thermal stress, and better device yield.

Chemical & Plasma Resistance:

The SiC surface protects the graphite core from harsh process plasmas and gases, offering a resistance to repeated process cycles. Chemical inertness is especially beneficial in corrosive halogen-containing etchant or reactive gas environments.

Customization Available:

8-inch Waferholder Rings may be custom-designed to meet specific equipment or process requirements, i.e., variations in edge support design, location of slots, and mounting configuration. Our designers work with OEMs and fabs to provide the highest performance possible for each use.

Applications:

• LPCVD / PECVD / APCVD
• Epitaxial Growth Processes
• Diffusion Furnaces
• High-Temperature Annealing
• Other Semiconductor Thermal Processing Systems

Every 8-inch Waferholder Rings undergoes rigorous inspection like dimension accuracy verification, coating adhesion test, and thermal cycling qualification. Our advanced manufacturing technology ensures uniform SiC coating thickness and finest surface finish to fulfill the semiconductor industry's high demands.

Semicorex 8-inch Waferholder Rings (SiC-coated graphite) are an essential equipment for next-generation semiconductor production, providing mechanical precision, material durability, and chemical stability. From process equipment upgrades to the construction of next-generation wafer platforms, this product offers the reliability and performance needed to enable today's demanding production environments.