Wafer Boats

Semicorex Wafer boats manufactured from high-purity silicon carbide (SiC) are essential components in the fabrication of semiconductors. The semiconductor processes in which they are used typically include high-temperature and corrosive environments such as diffusion, oxidation, and LPCVD processes. The application of SiC wafer boats has been engineered to maximize thermal stability and chemical resistance, allowing for optimal support, alignment and transport of silicon wafers during processing for optimal yields and device performance.

Silicon Carbide is well documented as an excellent thermally conductive ceramic, exhibiting high mechanical strength and superior thermal shock resistance, oxidation resistance, and aggressive chemical resistance with chemicals such as HF and HCl. The properties of SiC make it especially attractive as a material for wafer boats for next-generation semiconductor fabrication processes and in high-temperature environments. SiC wafer boats can maintain structural integrity and dimensional stability at process temperatures of >1500°C, minimizing the risk of warping or contamination of wafers in critical thermal treatments.

Each SiC wafer boat is manufactured from high-purity SiC using advanced ceramic forming and sintering processes, and can be tailored for an extensive range of wafer diameters (100 mm, 150 mm, 200 mm, 300 mm) as well as stacking configurations whether vertical or horizontal . Our SiC wafer boats have smooth surfaces and excellent flatness which minimizes particle generation and are ideal for automated wafer handling systems.

Contamination control and yield are two of the most critical issues in modern day fabs. SiC wafer carriers’ cleanliness and dependability influence the product quality and consistency process performance.  SiC wafer boats have much better longevity for usage, have fewer maintenance requirements and lower TCO than quartz or alumina based alternatives. Better longevity also means fewer problems with micro-particle shedding, therefore again, impacting the cleanliness of the wafer surface and impacting clean room cleanliness.

Semicorex is focused on designing and manufacturing SiC wafer boats that use the highest possible purity raw materials combined with low contamination atmosphere sintering.  We make every effort to maintain low impurity levels, to maintain porosity at low value, and uniform microstructure so the team's work can regularly enjoy consistent thermal characteristics, precise wafer spacing and unrivaled chemical degradation resistance.

Semicorex SiC wafer boats are a necessary element of high temperature processing of semiconductors. High-Purity Silicon Carbid wafer boats have unparalleled material characteristics, engineered excellence, and micro-contamination-free temperament, make them the high level choice for high performance wafer fabrication. Semicorex provides the reliability and innovative high performance to support your most mission critical semiconductor processes.