SiC Process Tube

Semicorex SiC (Silicon Carbide) process tube is a specialized component used in wafer heat treatment processes, particularly in applications that require high temperatures, corrosive atmospheres, or both. It is designed to provide a protective and controlled environment for semiconductor wafers during heat treatment or thermal processing.

The process tube is carefully engineered to create a sealed chamber where wafers are placed for heat treatment. It acts as a barrier, preventing the direct contact of wafers with the surrounding environment. This isolation is crucial to maintain the purity of the processing atmosphere and protect the wafers from contamination.

Inside the SiC process tube, the wafer heat treatment takes place. This can include various processes such as annealing, oxidation, diffusion, and other thermal treatments required to modify the properties of the wafer material. The tube's properties, such as its high thermal conductivity and resistance to chemical attack, help ensure uniform temperature distribution and protection of the wafers.

SiC process tubes are critical components in wafer heat treatment processes. Their high-temperature resistance, chemical inertness, and ability to create a controlled environment ensure the successful execution of thermal processing steps, leading to the production of high-quality semiconductor wafers.