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SiC-coated planetary susceptors

Semicorex SiC-coated planetary susceptors are the high-precision graphite supporting components covered with a dense silicon carbide coating, specially engineered for the advanced MOCVD equipment. They can enable uniform gas flow and thermal distribution, thus contributing to creating an optimal epitaxial environment.

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TaC Coated Planetary Plate

Semicorex TaC Coated Planetary Plate is a high-precision component designed for MOCVD epitaxial growth, featuring planetary motion with multiple wafer pockets and optimized gas flow control. Choosing Semicorex means accessing advanced coating technology and engineering expertise that deliver exceptional durability, purity, and process stability for the semiconductor industry.*

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Planetary Susceptor

Semicorex Planetary Susceptor is a high-purity graphite component with a SiC coating, designed for Aixtron G5+ reactors to ensure uniform heat distribution, chemical resistance, and high-precision epitaxial layer growth.*

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ALD Planetary Susceptor

Semicorex ALD Planetary Susceptor is important in ALD equipment due to their ability to withstand harsh processing conditions, ensuring high-quality film deposition for a variety of applications. As the demand for advanced semiconductor devices with smaller dimensions and enhanced performance continues to grow, the use of the ALD Planetary Susceptor in ALD is expected to expand further.**

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TaC Coated Planetary Susceptor

Semicorex TaC Coated Planetary Susceptor is a highly specialized component designed for use in the epitaxial processes of semiconductor manufacturing. Semicorex is dedicated to delivering top-quality products at competitive prices. We are eager to establish a long-term partnership with you in China.*

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TaC Coating Planetary Plate

Semicorex TaC Coating Planetary Plate is a high-performance component designed specifically for MOCVD systems. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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