SiC Ceramic Vacuum chucks

Precision-engineered micro-holes are uniformly distributed across the surface of SiC ceramic vacuum chucks, enabling reliable connection to the external vacuum equipment. During operating, the vacuum pump is activated to draw air through the holes, creating a negative pressure environment between the semiconductor wafer and the vacuum chuck. This therefore allows the wafer to be uniformly and firmly held onto the vacuum chuck surface.

The advantages of Semicorex SiC ceramic vacuum chucks

1.Premium material selection

Semicorex SiC ceramic vacuum chucks carefully select high-purity silicon carbide as raw material. Semicorex’ s stringent control over material purity effectively prevents wafer contamination caused by impurities during operation, thus meeting the growing demands for production cleanliness and yield.

2.Fine machining precision

Semicorex SiC ceramic vacuum chucks’ surface undergoes mirror polishing, and their flatness are controlled at 0.3–0.5 μm. This extreme flatness control can enable optimal contact effect, which greatly lower the risk of wafer scratches caused by rough contact surfaces. Each micro-hole and groove in vacuum chucks are precision-machined, thereby providing a stable and uniform adsorption effect during operating.

3.Flexible customization services

Semicorex provides our valued customers with customization services, offering various size options of SiC ceramic vacuum chucks, such as 6-inch, 8-inch, 12-inch. We can tailor dimensional tolerances, pore size, flatness, and roughness to meet customer requirements, ensuring a perfect match with your semiconductor processing and inspection equipment.

4.Excellent durability and lifespan

Semicorex SiC ceramic vacuum chucks are formed by isostatic pressing and then sintered at high temperature. After these special processes technology, Semicorex SiC ceramic vacuum chucks possess multiple excellent performance, such as lightweight, high rigidity, strong wear resistance, and low coefficient of thermal expansion. These properties enable Semicorex SiC ceramic vacuum chucks to be constantly operated in the challenging conditions in semiconductor wafer handling and processing.