SiC Ceramic Cantilever Paddle

Large wafer loading force silicon carbide SiC ceramic cantilever paddle is suitable for a robot automatic loading and handling system because it has stable performance, non-deformation in high temperature and large wafer loading force. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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Product Description

Since the section of the cantilever paddle is stable with no deformation, it is possible to make larger size wafer using existing furnace tubes. SiC ceramic cantilever paddle can be applied to LPCVD on basis of its similar thermal expansion coefficient with LPCVD coating, which greatly prolongs the maintenance and cleaning cycle, and significantly reduce pollutants.

We can produce the product according to your drawings and the work environment.

Features:

Large load

Low thermal conductivity

High temperature resistance