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Robot End Effector

Robot End Effector

Semicorex is a leading independently owned manufacturer of Silicon Carbide Coated Graphite, Precision Machined High Purity Graphite focusing on the Silicon Carbide Coated Graphite, Silicon Carbide Ceramic, MOCVP areas of semiconductor manufacturing. Our Robot End Effector has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Robot End Effector is the robot's hand which move semiconductor wafers between positions in wafer processing equipment and carriers. Robot End Effector must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without damaging devices or producing particulate contamination. Our high-purity silicon carbide (SiC) coating Robot End Effector provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance.

Parameters of Robot End Effector

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase


g/cm ³



Vickers hardness


Grain Size



Chemical Purity



Heat Capacity

J·kg-1 ·K-1


Sublimation Temperature


Felexural Strength

MPa (RT 4-point)


Young’ s Modulus

Gpa (4pt bend, 1300℃)


Thermal Expansion (C.T.E)



Thermal conductivity



Features of Robot End Effector

High purity SiC coated graphite

Superior heat resistance & thermal uniformity

Fine SiC crystal coated for a smooth surface

High durability against chemical cleaning

Material is designed so that cracks and delamination do not occur.

Hot Tags: Robot End Effector, China, Manufacturers, Suppliers, Factory, Customized, Bulk, Advanced, Durable

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