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Products
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Silicon Carbide Focus Rings
Silicon carbide focus rings, the crucial ring parts, are specially designed to improve the uniformity and stability of wafer etching in the semiconductor plasma etching. They are renowned for their excellent performance in promoting uniform plasma distribution and optimizing electric field environment.
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Silicon Carbide Cooling Ducts
Made of the high performing silicon carbide ceramic, silicon carbide cooling ducts are performant pipe components used in cooling processes of high-temperature industrial kilns. Choose Semicorex for precision-engineered Silicon carbide cooling ducts that ensure consistent quality, cost-effective price, and maximized cooling efficiency.
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Silicon Carbide ICP Etching Plate
Silicon Carbide ICP Etching Plate is indispensable wafer holder manufactured by high-purity sintered silicon carbide ceramic. Specially designed by Semicorex, it serves as the crucial enablers for inductively coupled plasma (ICP) etching and deposition systems in the cutting-edge semiconductor industry.
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Silicon Carbide Chucks
Semicorex silicon carbide chucks are specially designed for photolithography equipment and have multiple advantages such as high precision, ultra-light weight, high stiffness, low coefficient of thermal expansion, and excellent wear resistance.
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Silicon Carbide Scanning Mirrors
Semicorex Silicon Carbide Scanning Mirrors deliver exceptional precision, speed, and stability for the most demanding optical scanning applications. Choose Semicorex for unmatched expertise in SiC engineering, offering tailored geometries, premium coatings, and proven reliability in high-performance optical systems.*
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Silicon Carbide Vacuum Chuck
Semicorex Silicon Carbide Vacuum Chuck is a high-performance wafer handling solution crafted from porous silicon carbide. It is specifically engineered for vacuum adsorption of semiconductor wafers during critical processes such as mounting (waxing), thinning, de-waxing, cleaning, dicing, and rapid thermal annealing (RTA). Choose Semicorex for unmatched material purity, dimensional precision, and reliable performance in demanding semiconductor environments.*
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