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SiC-coated Graphite Plates

SiC-coated Graphite Plates

Semicorex SiC-coated Graphite Plates are high-purity carriers specifically engineered for the rigorous demands of SiC and GaN epitaxy, utilizing a dense CVD Silicon Carbide coating on an isostatic graphite substrate to provide a stable, chemically inert thermal barrier for high-yield wafer processing. Semicorex supplies qualified products and service for global customers.*

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PECVD Solar Graphite Boat

PECVD Solar Graphite Boat

Semicorex PECVD solar graphite boat is the essential graphite carrier and electrode component used in the plasma-enhanced chemical vapor deposition (PECVD) processes. They are widely-used to support silicon wafers or solar cells to achieve the film deposition (such as silicon nitride anti-reflective films) in the challenging high-temperature plasma operating conditions.

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TaC Coated Graphite Crucible

TaC Coated Graphite Crucible

Semicorex TaC Coated Graphite Crucible is made by the Tantalum Carbide coating graphite through the CVD method, which is the most suitable material applied in the semiconductor manufacturing process. Semicorex is a company that consistently specializes in CVD ceramic coating and offers the best material solutions in the semiconductor industry.*

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Oil-free Graphite Bushings

Oil-free Graphite Bushings

Semicorex oil-free graphite bushings are innovative bearing components that combine high load-bearing capacity with self-lubricating properties. with the sophisticated manufacturing techniques and reliable product quality, Semicorex oil-free graphite bushings are well-suited for equipment operating under complex conditions such as oil-free operation, high temperatures, heavy loads, low speeds, and contamination, corrosion and radiation resistance requirements.

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Graphite Air Bearings

Graphite Air Bearings

Semicorex Graphite Air Bearings is a porous graphite with 15%~18% porosity used in air bearings, this is a self-lubricating bearing. Semicorex provides suitable graphite based on customer needs worldwide.*

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Porous Graphite for Air-floating Bearings

Porous Graphite for Air-floating Bearings

Semicorex porous graphite for air-floating bearings is the strong-performing porous graphite medium made from high-quality graphite powder through the special manufacturing process. As the specifically designed porous graphite throttling layer, they can maintain the long-term stable and efficient operation of air-floating bearings.

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