PECVD Solar Graphite Boat

Semicorex PECVD solar graphite boats are precision-made from high-purity isostatic graphite. Each PECVD solar graphite boat from Semicorex undergoes precise machining, dimensional inspection, and electrical performance testing to ensure stable performance in high-temperature plasma environments.

During PECVD processing, the PECVD solar graphite boat carries silicon wafers into the PECVD reaction chamber and serves as the electrode connected to the RF power supply. When an alternating voltage is applied between adjacent boat plates, an electric field is established. Under the influence of the electric field, the reactive gases (such as silane SiH₄ and ammonia NH₃) undergo glow discharge and generate plasma. Ions and free radicals in the plasma decompose the precursor gases, forming silicon (Si) and nitrogen (N) ions. These ions combine to form silicon nitride (Si₃N₄) molecules, which are then deposited on the surface of the silicon wafer to form thin films.

1. Exceptional thermal stability

With a thermal expansion coefficient close to that of silicon wafers, Semicorx PECVD solar graphite boat experiences negligible dimensional change upon heating, which reliably avoids thermal stress-induced damage to the wafers.

2. Superior electrical and thermal conductivity

Semicorex PECVD solar graphite boats have excellent electrical conductivity, ensuring rapid conduction of RF current and uniform electric field distribution, which is beneficial for stable plasma generation and uniform silicon wafer deposition. Additionally, its superior thermal conductivity facilitates rapid cooling and heating, improving production efficiency while preventing localized overheating from affecting deposition quality.

3. Strong chemical stability

Thanks to the use of premium-grade material, Semicorex PECVD solar graphite boat is less prone to reaction with the reactive gases and plasma. This characteristic significantly prevents uneven electric field distribution caused by corrosion, deformation, or impurity deposition in the graphite boat, thus ensuring the stability of the deposition process and the surface quality of silicon wafers.

4. Outstanding mechanical strength

With its outstanding mechanical strength, Semicorex PECVD solar graphite boat can asily handle the weight of high-volume wafer loads. They can withstand the mechanical stress generated during loading and transportation for a long time without easily deforming or breaking.

5. Excellent dimensional consistency

Semicorex PECVD solar graphite boat achieves exceptional dimensional accuracy across all components through precision machining. It keeps the silicon wafer in a fixed position during deposition, which ensures uniform deposition and compatibility with automated production.