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Furnace Tubes for LPCVD

Semicorex furnace tubes for LPCVD are the precision-manufactured tubular components with uniform and dense CVD SiC coating. Specially-designed for the advanced low pressure chemical vapor deposition process, Semicorex furnace tubes for LPCVD are able to provide suitable high-temperature, low-pressure reaction environments to improve the quality and yield of wafer thin-film deposition.

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Graphite Insulation Shield

Semicorex Graphite Insulation Shield is a high-temperature rigid graphite felt component designed to improve thermal efficiency and protect critical furnace hot zone structures. Semicorex delivers reliable hot-zone components with stable quality, fast delivery, and competitive cost.*

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Wafer Vacuum Chucks

Semicorex Wafer Vacuum Chucks are ultra-precision SiC vacuum chucks designed for stable wafer fixation and nanometer-level positioning in advanced semiconductor lithography processes. Semicorex provides high-performance domestic alternatives to imported vacuum chucks with faster delivery, competitive pricing, and responsive technical support.*

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15" Quartz Bell Jar

Semicorex 15" Quartz Bell Jar is a high-precision reaction chamber component meticulously crafted from ultra-high purity fused silica. Designed for the most demanding semiconductor environments, it serves as a critical transparent barrier for Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), and epitaxial growth processes. Semicorex are keen to provide the high quality and cost efficient products for worldwide customers.*

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SiC Ceramic Vacuum Chuck

Semicorex SiC Ceramic Vacuum Chuck is manufactured from high-purity Sintered Dense Silicon Carbide (SSiC), are the definitive solution for high-precision wafer handling and thinning, providing unparalleled stiffness, thermal stability, and sub-micron flatness. Semicorex are keen to provide the high quality and cost efficient products for worldwide customers.*

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1x2" Graphite Wafer Susceptors

Semicorex 1x2" graphite wafer susceptors are the high-performing carrying components specially engineered for 2-inch wafers, which are well-suited for the epitaxial process of semiconductor wafers. Choose Semicorex for industry-leading material purity, precision engineering, and unmatched reliability in demanding epitaxial growth environments.

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