Alumina Robotic Arms

Semicorex alumina robotic arms are typically installed in the wafer-handling robots, serving as the wafer transfer end effector that functions as the safe and precise transfer of semiconductor wafers to required positions. Through their internal air holes and gas channels, alumina robotic arms can generate steady negative pressure to firmly adsorb semiconductor wafers. This adsorption method achieves gentle contact with the wafer surface, which effectively prevents the unwanted surface scratches and mechanical damages, thereby ensuring all-around protection for semiconductor wafers.

Advantages of alumina robotic arms

Semicorex implements strict quality control for its products starting from raw material selections.

Its alumina robotic arms are precisely manufactured from high-purity alumina granulation powder, exhibiting excellent properties as follows.

1. Ultra-high cleanliness

Semicorex alumina robotic arms feature high material purity and dense micro-structure, which enables them to avoid metal ion release and micro-particle shedding during the operation, thus fully meeting the strict cleanliness requirement of semiconductor manufacturing.

2. High electrical insulation performance

Thanks to their high electrical insulation performance, Semicorex alumina robotic arms are able to minimize charge generation during their operation. This reliable performance can effectively avoid the unwanted charges transferred by alumina robotic arms to semiconductor components and lower the damage risk to the sensitive semiconductor components.

3. Favorable cost performance

Different from SiC robotic arms, alumina robotic arms offer an economical price while maintaining stable performance. Semicorex alumina robotic arms deliver excellent mechanical strength, wear resistance, heat resistance, and corrosion resistance, making them perform steadily under the heavy load, high-frequency operation, high temperature, and highly corrosive working conditions for a long time. This superior durability effectively extends the service life of alumina robotic arms, reducing the efficiency and cost of component replacement.

Applications of Semicorex alumina robotic arms

Semicorex alumina robotic arms are widely applied in the front end of semiconductor manufacturing procedures, including etching, thin film deposition, ion implantation, and CMP processes. They can stably, safely, and precisely support, transfer, and position semiconductor wafers and components across various process chambers and equipment under vacuum and high-cleanliness operating conditions.