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MOCVD Inlet Rings

MOCVD Inlet Rings

Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite in China. Our MOCVD Inlet Rings have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

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Product Description

Semicorex supplies MOCVD Inlet Rings used in the deposition and wafer processing, which is really stable for RTA, RTP or harsh chemical cleaning. Our MOCVD Inlet Rings have high-purity silicon carbide (SiC) coated graphite construction, which provide superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance. Fine SiC crystal coating provides a clean, smooth surface, critical for handling since pristine wafers contact the susceptor at many points across their entire area.

At Semicorex, we focus on providing high-quality, cost-effective MOCVD Inlet Rings, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.

Parameters of MOCVD Inlet Rings

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase


g/cm ³



Vickers hardness


Grain Size



Chemical Purity



Heat Capacity

J·kg-1 ·K-1


Sublimation Temperature


Felexural Strength

MPa (RT 4-point)


Young’ s Modulus

Gpa (4pt bend, 1300℃)


Thermal Expansion (C.T.E)



Thermal conductivity



Features of MOCVD Inlet Rings

- Good density and can play a good protective role in high temperature and corrosive working environments.

- High melting point, high temperature oxidation resistance, corrosion resistance.

Hot Tags: MOCVD Inlet Rings, China, Manufacturers, Suppliers, Factory, Customized, Bulk, Advanced, Durable

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