LPE Part

Semicorex LPE Parts are high-performance SiC-coated components specifically designed for use in the SiC epitaxy process. These components are engineered to withstand the demanding conditions of SiC crystal growth, providing superior thermal stability, chemical resistance, and mechanical strength. When choosing Semicorex’s LPE Parts, you are guaranteed exceptional durability, precision, and a tailored solution for your SiC epitaxy process needs.

Semicorex LPE Parts are crafted with advanced materials and precise manufacturing techniques, ensuring consistency and reliability in every unit. The physical and chemical properties of the coating have strict requirements for high temperature resistance and corrosion resistance, which directly affect the yield and life of the product. SiC material has high strength, high hardness, low thermal expansion coefficient and good thermal conductivity. It is an important high-temperature structural material and high-temperature semiconductor material. It is applied to graphite bases. Its advantages are:

1) SiC is corrosion-resistant and can fully wrap the graphite base, and has good density to avoid damage by corrosive gases. 2) SiC has high thermal conductivity and high bonding strength with the graphite base, ensuring that the coating is not easy to fall off after experiencing multiple high-temperature and low-temperature cycles. 3) SiC has good chemical stability to avoid the failure of the coating in a high-temperature and corrosive atmosphere. In addition, epitaxial furnaces of different materials require graphite trays with different performance indicators. The matching of the thermal expansion coefficient of graphite materials requires adaptation to the growth temperature of the epitaxial furnace. For example, the temperature of silicon carbide epitaxy is high, and a tray with a high thermal expansion coefficient matching is required. The thermal expansion coefficient of SiC is very close to that of graphite, making it suitable as the preferred material for the surface coating of the graphite base.

Applications in the SiC Epitaxy Process

The SiC epitaxy process is a critical step in the production of high-quality SiC wafers used for semiconductor devices, including power electronics and optoelectronics. LPE Parts, particularly those with SiC coatings, play an essential role in the precise control of temperature and chemical reactions within the reactor. These components are strategically placed in the reactor to facilitate optimal wafer growth while maintaining the purity and uniformity of the SiC crystals.

At Semicorex, we understand that every SiC epitaxy process has unique requirements. That’s why our LPE Parts can be fully customized to meet the specific needs of your operation. Whether it is the size, shape, or coating thickness, our engineering team works closely with clients to deliver components that optimize their production processes.

The high-quality SiC coating applied to our parts also ensures superior durability. Unlike conventional materials, SiC offers a longer lifespan in harsh operating conditions, reducing the frequency of maintenance and downtime. This longevity translates to lower operational costs and increased efficiency for semiconductor manufacturers.

Semicorex LPE Parts are designed with precision and engineered to meet the stringent demands of the SiC epitaxy process. Our components are produced using the latest technology, ensuring that they provide unmatched performance and longevity. By choosing Semicorex, you are selecting a partner who understands the complexities of semiconductor manufacturing and is committed to delivering reliable, high-quality products that enhance your production capabilities.

Semicorex LPE Parts, with their SiC coating, are the ideal choice for enhancing the performance and longevity of SiC epitaxy reactors. These components provide superior thermal stability, chemical resistance, and mechanical strength, ensuring that your SiC crystal growth process runs smoothly and efficiently. With customization options available, Semicorex offers a tailored solution that meets your specific process requirements, making us the trusted partner for semiconductor manufacturers worldwide.