Diffusion Furnace Tube

Semicorex Diffusion Furnace Tube is a crucial component within semiconductor manufacturing equipment, specifically designed to facilitate precise and controlled reactions essential for semiconductor fabrication processes. As the primary vessel within the reaction zone of a semiconductor furnace, the diffusion furnace tube plays a pivotal role in ensuring the integrity and quality of the produced semiconductor devices. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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Product Description

Diffusion furnace tube is typically made from high-purity quartz or SiC, both of which exhibit exceptional thermal stability and resistance to chemical reactions. This is important because the diffusion furnace tube must not introduce impurities into the semiconductor materials being processed. Even the slightest impurities can have significant detrimental effects on the performance and reliability of the fabricated semiconductor devices.

The materials used in constructing the diffusion furnace tube are chosen for their high purity to prevent contamination of the semiconductor wafers during processing. The diffusion furnace tube withstand extreme temperatures encountered during semiconductor processing without deforming or compromising its structural integrity. This ensures consistent and reliable performance over prolonged periods of operation. In addition to thermal stability, the diffusion furnace tube also exhibits resistance to the corrosive effects of the chemicals and gases used in semiconductor processing. This prevents degradation of the tube over time and ensures longevity.

Some diffusion furnace tubes may feature liners made from specialized materials to further enhance their performance or provide additional protection against contamination or chemical reactions. These liners are carefully selected to complement the properties of the tube material and the specific requirements of the semiconductor fabrication process.