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Ceramic Wafer Boat
  • Ceramic Wafer BoatCeramic Wafer Boat
  • Ceramic Wafer BoatCeramic Wafer Boat
  • Ceramic Wafer BoatCeramic Wafer Boat
  • Ceramic Wafer BoatCeramic Wafer Boat
  • Ceramic Wafer BoatCeramic Wafer Boat

Ceramic Wafer Boat

Semicorex provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. We have been manufacturer and supplier of silicon carbide coating film for many years. Our Ceramic Wafer Boat has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Introducing our high-quality silicon carbide Ceramic Wafer Boat, designed to provide a reliable solution for wafer processing in various industries. These ceramic pedestals are manufactured using high-purity ceramics, which offer excellent resistance to thermal shock, abrasion, and chemical corrosion, making them ideal for harsh wafer processing environments.
Our Ceramic Wafer Boat are also highly customized, and we can work with you to create custom pedestals to meet your unique specifications. We take pride in our ability to deliver high-quality, reliable products that meet the demands of our customers. Our Ceramic Wafer Boat are made to last and offer a long service life, ensuring that you get the most value out of your investment.
Order now and experience the benefits of our high-quality Ceramic Wafer Boat in your wafer processing operations.


Parameters of Ceramic Wafer Boat

Technical Properties

Index

Unit

Value

Material Name

Reaction Sintered Silicon Carbide

Pressureless Sintered Silicon Carbide

Recrystallized Silicon Carbide

Composition

RBSiC

SSiC

R-SiC

Bulk Density

g/cm3

3

3.15 ± 0.03

2.60-2.70

Flexural Strength

MPa (kpsi)

338(49)

380(55)

80-90 (20°C) 90-100(1400°C)

Compressive Strength

MPa (kpsi)

1120(158)

3970(560)

> 600

Hardness

Knoop

2700

2800

/

Breaking Tenacity

MPa m1/2

4.5

4

/

Thermal Conductivity

W/m.k

95

120

23

Coefficient of Thermal Expansion

10-6.1/°C

5

4

4.7

Specific Heat

Joule/g 0k

0.8

0.67

/

Max temperature in air

1200

1500

1600

Elastic Modulus

Gpa

360

410

240


The difference between SSiC and RBSiC:

1. Sintering process is different. RBSiC is to infiltrate free Si into silicon carbide at a low temperature, SSiC is formed by natural shrinkage at 2100 degrees.

2. SSiC have smoother surface, higher density and higher strength, for some sealings with more strict surface requirements, SSiC will be better.

3. Different used time under different PH and temperature, SSiC is longer than RBSiC


Features of Ceramic Wafer Boat

Made using high-purity alumina ceramics for excellent resistance to thermal shock, abrasion, and chemical corrosion
Designed for optimal support and stability during wafer processing, minimizing the risk of damage or contamination
Available in a range of sizes to accommodate different wafer diameters and thicknesses
Customizable to meet unique specifications
Built to last and offer a long service life



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