Ceramic Wafer Boat

Semicorex provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. We have been manufacturer and supplier of silicon carbide coating film for many years. Our Ceramic Wafer Boat has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Introducing our high-quality silicon carbide Ceramic Wafer Boat, designed to provide a reliable solution for wafer processing in various industries. These ceramic pedestals are manufactured using high-purity ceramics, which offer excellent resistance to thermal shock, abrasion, and chemical corrosion, making them ideal for harsh wafer processing environments.
Our Ceramic Wafer Boat are also highly customized, and we can work with you to create custom pedestals to meet your unique specifications. We take pride in our ability to deliver high-quality, reliable products that meet the demands of our customers. Our Ceramic Wafer Boat are made to last and offer a long service life, ensuring that you get the most value out of your investment.
Order now and experience the benefits of our high-quality Ceramic Wafer Boat in your wafer processing operations.

Parameters of Ceramic Wafer Boat

Technical Properties
Index	Unit	Value
Material Name		Reaction Sintered Silicon Carbide	Pressureless Sintered Silicon Carbide	Recrystallized Silicon Carbide
Composition		RBSiC	SSiC	R-SiC
Bulk Density	g/cm3	3	3.15 ± 0.03	2.60-2.70
Flexural Strength	MPa (kpsi)	338(49)	380(55)	80-90 (20°C) 90-100(1400°C)
Compressive Strength	MPa (kpsi)	1120(158)	3970(560)	> 600
Hardness	Knoop	2700	2800	/
Breaking Tenacity	MPa m1/2	4.5	4	/
Thermal Conductivity	W/m.k	95	120	23
Coefficient of Thermal Expansion	10^-6.1/°C	5	4	4.7
Specific Heat	Joule/g 0k	0.8	0.67	/
Max temperature in air	℃	1200	1500	1600
Elastic Modulus	Gpa	360	410	240

The difference between SSiC and RBSiC:

1. Sintering process is different. RBSiC is to infiltrate free Si into silicon carbide at a low temperature, SSiC is formed by natural shrinkage at 2100 degrees.

2. SSiC have smoother surface, higher density and higher strength, for some sealings with more strict surface requirements, SSiC will be better.

3. Different used time under different PH and temperature, SSiC is longer than RBSiC

Features of Ceramic Wafer Boat

Made using high-purity alumina ceramics for excellent resistance to thermal shock, abrasion, and chemical corrosion
Designed for optimal support and stability during wafer processing, minimizing the risk of damage or contamination
Available in a range of sizes to accommodate different wafer diameters and thicknesses
Customizable to meet unique specifications
Built to last and offer a long service life