Carbon Insulation Felt

Semicorex Carbon Insulation Felt is a high-performance thermal insulation material specifically engineered for use in the crystal growth process of the semiconductor industry. Manufactured from high-purity carbon or graphite fibers, this Carbon Insulation Felt is optimized to meet the stringent thermal management and purity requirements of high-temperature furnace environments used in the growth of single crystals, such as silicon (Si), silicon carbide (SiC), and other compound semiconductors.

The growth process of single crystal silicon is completely carried out in the thermal field. A good thermal field is conducive to improving the crystal quality and has a higher crystallization efficiency. The design of the thermal field largely determines the changes in the temperature gradients in the dynamic thermal field and the flow of gas in the furnace chamber. The difference in the materials used in the thermal field directly determines the service life of the thermal field.

In the CZ single crystal silicon furnace, carbon fiber composite materials are sometimes used. At present, they have begun to be used to manufacture bolts, nuts, crucibles, load plates and other components. Carbon Insulation Felt are carbon fiber reinforced carbon-based composite materials with high specific strength, high specific modulus, low thermal expansion coefficient, good conductivity, high fracture toughness, low specific gravity, thermal shock resistance, corrosion resistance, high temperature resistance and other excellent properties. At present, as a new type of high temperature resistant structural material, it is widely used in aerospace, racing, biomaterials and other fields.

Polyacrylonitrile-based Carbon Insulation Felt has a large ash content. After high-temperature treatment, the single fiber becomes brittle. During operation, it is easy to generate dust to pollute the furnace environment. At the same time, the fiber can easily enter the pores and respiratory tract of the human body, which is harmful to human health. Viscose-based carbon felt has good thermal insulation performance. It is relatively soft after heat treatment and is not easy to generate dust. However, the cross-section of the viscose-based raw fiber is irregular, and there are many grooves on the fiber surface. In the presence of an oxidizing atmosphere in a CZ silicon furnace, it is easy to generate gases such as C02, causing the precipitation of oxygen and carbon elements in the single crystal silicon material. At present, the most widely used in the semiconductor single crystal industry is asphalt-based carbon felt, which has worse thermal insulation performance than viscose-based carbon felt, but asphalt-based carbon felt has a higher purity and a lower dust emission.

The growth quality of single crystal silicon is directly affected by the thermal field environment, and carbon fiber thermal insulation materials play a key role in this environment. Carbon fiber thermal insulation soft felt still has a significant advantage in the photovoltaic semiconductor industry due to its cost advantage, excellent thermal insulation effect, flexible design and customizable shape. In addition, carbon fiber rigid insulation felt will have greater room for development in the thermal field material market due to its certain strength and higher operability.