6-Inch SiC Wafer Boats

The diffusion process is the basic doping technique in the high-end integrated circuit manufacturing. The diffusion process introduces impurity elements into silicon substrates at high temperatures. Regulation over the type, concentration and distribution areas of the main charge carriers within the wafer substrate enables precise manipulation of the substrates’ conductivity and conductivity type. As the indispensable components used in horizontal diffusion furnace systems, Semicorex 6-inch SiC wafer boats sustain reliable performance under long-term mass manufacturing cycles, benefiting from the following aspects:

1. Premium Raw Material Selections

Semicorex uses high-purity semiconductor-grade silicon carbide to manufacture the bases of wafer boats with a dense CVD SiC coating on their surface. Thanks to these constructions, our 6-inch SiC wafer boats deliver outstanding properties as follows:

A. Extreme cleanliness and contamination free

B. High hardness, high strength and superior wear resistance

C. Exceptional high-temperature resistance and thermal stability

D. Dependable corrosion resistance

2. Thoughtful structural optimization

To better accommodate customers’ operating needs, Semicorex 6-inch SiC wafer boats incorporate multiple user-friendly structural upgrades as follows:

A. The open hollow frame facilitates even flow of process gas between wafers to improve process consistency across all wafers.

B. Dual-side fork handling holes are engineered with the material handling systems for stable and precise pick-and-place positioning.

C. The 25-bit wafer slot setup supports batch diffusion processing to greatly enhance manufacturing efficiency.

D. Special optimized angle of wafer slots allows effortless wafer insertion and extraction to minimize wafer damage during operation.

3. Experienced manufacturing capability

Semicorex is equipped with a professional technical supporting team and advanced integrated production lines, delivering the following superior manufacturing capability:

A. Semicorex adopts 3D printing forming technology for the production of 6-inch SiC wafer boats, offering customized solutions on wafer boat structure, dimensions, slot type, slot pitch and tolerances based on customers’ needs.

B. Semicorex supports small batch trial order production and large mass productions of our 6-inch SiC wafer boats.

C. Semicorex’s superior manufacturing capability is also reflected in our efficient production lead time, which typically ranges from 35-60 days, effectively shortening customers’ waiting cycles.