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4" 6" 8" N-type SiC Ingot

Semicorex provides N-type SiC ingot with 4 inches, 6 inches and 8 inches. We have been manufacturer and supplier of wafers for many years. Our 4" 6" 8" N-type SiC Ingot has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Semicorex provides 4" 6" 8" N-type SiC Ingot. We have been manufacturer and supplier of wafers for many years.

4 Inch N-type SiC Ingot Specification

Items

Production Grade

Dummy Grade

Polytype

4H

Dopant

n-type Nitrogen

Resistivity

0.015~0.025 ohm ·cm

0.015~0.028 ohm ·cm

Diameter

100.25±0.25 mm

Thickness

≥15 mm

Surface orientation error

4°toward<11-20>±0.2°

Primary flat orientation

[1- 100]±5.0°

Primary flat length

32.5±1.5 mm

Secondary flat

90.0°CW from Primary ±5.0°, silicon face up

Secondary flat length

18±1.5 mm

Micropipe density

≤0.5 ea/cm2

≤10 ea/cm2

BPD

≤2000 ea/cm2

--

TSD

≤500 ea/cm2

--

Edge Cracks

≤3 ea,≤1mm/ea

≤5 ea,≤3mm/ea

Polytype areas

None

≤5% area

Edge indents

≤3 ea,≤1mm width and depth

≤5 ea,≤2mm width and depth

Label

C-face

Packaging

unit-ingot cassette, vacuum packaging

6 Inch N-type SiC Ingot Specification

Items

Production Grade

Dummy Grade

Polytype

4H

Dopant

n-type Nitrogen

Resistivity

0.015~0.025

0.015~0.028

Diameter

150.25±0.25 mm

Thickness

≥15 mm

Surface orientation error

4°toward<11-20>±0.2°

Primary flat orientation

[1- 100]±5.0°

Primary flat length

47.5±1.5 mm

Micropipe density

≤0.5 ea/cm2

≤10 ea/cm2

BPD

≤2000 ea/cm2

--

TSD

≤500 ea/cm2

--

Edge Cracks

≤3 ea,≤1mm/ea

≤5 ea,≤3mm/ea

Polytype areas

None

≤5% area

Edge indents

≤3 ea,≤1mm width and depth

≤5 ea,≤2mm width and depth

Label

C-face

Packaging

unit-ingot cassette, vacuum packaging

8 Inch N-type SiC Ingot Specification

Items

Production Grade

Research Grade

Dummy Grade

Polytype

4H

Dopant

n-type Nitrogen

Resistivity

0.015~0.028

0.01~0.04

NA

Diameter

200.25±0.25 mm

Thickness

NA

Surface orientation error

4°toward<11-20>±0.5°

Notch orientation

[1- 100]±5.0°

Notch depth

1~1.5 mm

Micropipe density

≤2 ea/cm2

≤10 ea/cm2

≤50 ea/cm2

BPD

≤2000 ea/cm2

≤500 ea/cm2

--

TSD

≤500 ea/cm2

≤1000 ea/cm2

--

Edge Cracks

≤3 ea,≤1mm/ea

≤4 ea,≤2mm/ea

≤5 ea,≤3mm/ea

Polytype areas

None

≤20% area

≤30% area

Edge indents

≤3 ea,≤1mm width and depth

≤4 ea,≤2mm width and depth

≤5 ea,≤2mm width and depth

Label

C-face

Packaging

unit-ingot cassette, vacuum packaging




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