SiC Process Tubes

Semicorex SiC process tubes are the important structural components in oxidation, diffusion, RTA/RTP in semiconductor manufacturing process. It generally is a large diameter tube as a reactor furnace space, the all chemical processes will be happened inside. So the strength, the thermal shock resistance both are very basic points for the product.

The SiC process tubes are made by sintered Silicon Carbide, it can be SiSiC, SSiC, or RSiC, and the CVD SiC coating on the surface, which will forming a ultra high purity layer. It can prevent the pollution by particles, ash, etc. And the material has very high thermal shock resistance, so the SiC process tubes can stay stable in high temperature resistance, and prevent the impurities from precipitating out at high temperatures and thus polluting the environment.

This SiC process tubes are designed for use in atmospheres with reactive gas (oxygen), shield gas (nitrogen), and minimal amounts of hydrogen chloride gas, and offers outstanding chemical resistance, thermal stability, and material purity to 1250°C. The Semicorex SiC Process Tubes combine state-of-the-art 3D-printing manufacturing with chemical vapor deposition (CVD) coating to provide superior performance and lifespan under the most extreme thermal and chemical conditions.

The Semicorex SiC Process Tubes are produced via a 3D print integrated molding process rather than a conventional press formed or assembled tube. This manufacturing process allows for a continuous, consistent structure of ceramic with no joints and weak areas, creating a high degree of complexity and dimensional fidelity, which can alleviate stress concentrations while enhancing mechanical strength. Moreover, the monolithic structure provides a natural gas-tight seal, reducing contamination and leakage during high-temperature processes.

The SiC of body is an ultra-low impurity material (< 300 ppm), providing excellent material purity and stability for reactive atmospheres. In addition, the tube is coated with a CVD silicon carbide layer (< 5 ppm) to improve corrosion resistance and surface protection.

Semicorex provides the customized service, we can produce according to customers’ drawings, to meet required specifications requirement. So Semicorex SiC process tubes can be alternatively suitable not only for horizontal furnace, but also vertical furnaces.