Quartz Wafer Boats

Quartz wafer boats are precision carriers made of high-purity quartz used to hold and secure wafers. They are the indispensable key components in semiconductor and photovoltaic manufacturing, providing reliable guarantee for high-precision and high-efficiency production.

Quartz wafer boats are precision-machined into specific shapes and dimensions, resulting in excellent compatibility with a wide range of semiconductor process equipment. Their precisely engineered internal slots and optimized structural design meet the stringent requirements of wafer manufacturing processes for notch accuracy, parallelism, and perpendicularity, effectively reducing the risk of physical damage to the wafers.

The quartz material selected by Semicorex has a purity of ≥99.995% and extremely low impurity content, which can meet the strict purity requirements of crucial processes in the semiconductor production workflow and effectively prevent wafer contamination.

This high-purity quartz exhibits outstanding properties such as excellent high-temperature resistance, a low coefficient of thermal expansion, and strong chemical stability, which enable it to adapt to the complex process demands of semiconductor manufacturing. It can operate stably and long-term in high-temperature environments around 1200°C, meeting the requirements of processes such as semiconductor diffusion, oxidation, annealing, and high-temperature diffusion of photovoltaic cells, ensuring that wafers or silicon wafers are not damaged by deformation or melting during high-temperature processing.

Its strong chemical stability makes it unlikely to react with gases used in semiconductor processes or chemical reagents used in photovoltaic production, and it does not release impurities, ensuring a high cleanliness level in the production environment, guaranteeing product purity, and ensuring process stability.