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SiC-coated planetary susceptors

Semicorex SiC-coated planetary susceptors are the high-precision graphite supporting components covered with a dense silicon carbide coating, specially engineered for the advanced MOCVD equipment. They can enable uniform gas flow and thermal distribution, thus contributing to creating an optimal epitaxial environment.

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SiC Ceramic Wafer Boats

Semicorex SiC ceramic wafer boats are high-performance silicon carbide solutions engineered to safely support and transport wafers during state-of-the-art semiconductor manufacturing. Thanks to these excellent advantages,they are well-suited for the precise high-temperature semiconductor manufacturing processes like oxidation,diffusion,and CVD processes.

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SiC-Coated Gas Diversion Discs

Semicorex SiC-coated gas diversion discs are the indispensable graphite components applied in the semiconductor epitaxial equipment, engineered specially to regulate reaction gas flow and promote uniform gas distribution within the reaction chamber. Choose Semicorex, choose the optimal gas diversion solutions for high-quality wafer epitaxial results.

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SiC Wafer Carrier

Semicorex SiC Wafer Carrier is made of high-purity Silicon Carbide ceramic, through 3D print technology, which means it can achieve high-precious machining components within a short time. Semicorex is deem to provide the qualified high-quality products to our globally customers.*

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CVD SiC-coated upper ground rings

Semicorex CVD SiC-coated upper ground rings are the essential ring-shaped components engineered specially for the sophisticated plasma etching equipment. As the industry-leading supplier of semiconductor components, Semicorex focuses on delivering high-quality, long-lasting and ultra-clean CVD SiC-coated upper ground rings to help our valued customers improve operational efficiency and overall product quality.

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Solid CVD SiC Rings

Semicorex solid CVD SiC rings are high-performing ring-shaped components mainly used in the reaction chambers of plasma etching equipment in the advanced semiconductor industry. Semicorex solid CVD SiC rings undergo strict material selection and quality control, offering unparalleled material purity, exceptional plasma corrosion resistance and consistent operational performance.

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