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SiC Wafer Carrier

Semicorex SiC Wafer Carrier is made of high-purity Silicon Carbide ceramic, through 3D print technology, which means it can achieve high-precious machining components within a short time. Semicorex is deem to provide the qualified high-quality products to our globally customers.*

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CVD SiC-coated upper ground rings

Semicorex CVD SiC-coated upper ground rings are the essential ring-shaped components engineered specially for the sophisticated plasma etching equipment. As the industry-leading supplier of semiconductor components, Semicorex focuses on delivering high-quality, long-lasting and ultra-clean CVD SiC-coated upper ground rings to help our valued customers improve operational efficiency and overall product quality.

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Solid CVD SiC Rings

Semicorex solid CVD SiC rings are high-performing ring-shaped components mainly used in the reaction chambers of plasma etching equipment in the advanced semiconductor industry. Semicorex solid CVD SiC rings undergo strict material selection and quality control, offering unparalleled material purity, exceptional plasma corrosion resistance and consistent operational performance.

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SiC Seals

Semicorex SiC Seals are high-performance mechanical face components engineered to provide superior wear resistance, thermal stability, and universal chemical inertness in the most demanding rotating equipment environments. Semicorex is a professional SiC ceramic material provider, which can supply the high-precision products for global customers.*

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SiC Pedestal

Semicorex SiC Pedestal is a high-precision, multi-functional hardware component designed to provide the thermal stability and intricate fluid distribution required for advanced microchannel reaction systems. Semicorex specializes in the engineering and supply of these high-purity SiC pedestals according to customers’ needs.*

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SiC-Coated Graphite Jigs

Semicorex SiC-coated graphite jigs are the essential graphite components covered with a dense and uniform SiC coating. Combined with excellent properties of both graphite and silicon carbide, Semicorex SiC-coated graphite jigs perform reliably under the complex semiconductor packaging and testing conditions.

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