Teflon Cassettes

Semicorex Teflon Cassettes are high-performance wafer carriers specifically engineered for use in demanding chemical environments where purity, chemical resistance, and thermal stability are essential. Made from high-purity polytetrafluoroethylene (PTFE), these cassettes are widely used in semiconductor manufacturing, wet etching, chemical cleaning, and other applications where exposure to highly aggressive chemicals is routine. Their non-reactive nature makes them ideal for handling delicate substrates like silicon wafers, glass panels, and other precision components without introducing contamination or particulates into the process.

In various processes of semiconductor manufacturing, such as lithography, etching, and ion implantation, cassettes play a role in transporting and transferring wafers between different devices. Different process equipment may have different interface requirements for cassettes to ensure that wafer carriers can be accurately received and placed.

From the perspective of material and design, materials that are heat-resistant, have excellent mechanical properties, dimensional stability, and are durable, anti-static, low outgassing, low precipitation, and recyclable are generally used. Different wafer sizes, process nodes, and processes use different materials. The general materials are PFA, PTFE, PP, PEEK, PES, PC, PBT, PEI, COP, etc.

Teflon Cassettes offer superior chemical resistance in environments using hydrofluoric acid, nitric acid, sulfuric acid, and other strong corrosives. Unlike conventional materials like polypropylene or stainless steel, PTFE degrades not; does not swell; leaches no substances in harsh chemical baths. Performance is therefore guaranteed over long periods and hence the cassettes’ reliability for high-throughput production lines and ultra-clean environments. Its robustness means lower maintenance needs and replacement frequency, thereby reducing long-term operating costs.

Teflon Cassettes demonstrate very high thermal stability. They can easily withstand temperatures from -200°C to +260°C, applicable for cryogenic as well as for high-temperature processes. Even placed in heated drying chambers or cold chemical baths, the cassettes do not lose their structural strength; they do not warp or crack, ensuring that wafers will remain safely held during processing. This temperature resilience contributes significantly to process control and uniformity, which are critical for semiconductor and MEMS fabrication.

An equally important characteristic of Teflon Cassettes is its inert, non-stick surface. PTFE inherently does not allow adsorption of particles and chemical residues, therefore reducing the risks of contamination in cleanroom environments. This has to be coupled with a smooth surface finish that allows rinsing easy and drying quick, thus cleaner outcomes and faster cycle times result. In semiconductor processing, where defects can be caused by even microscopic contaminants, this cleanliness and chemical inertness level is mandatory.

Each cassette is accurately made to tight size tolerances, guaranteeing steady wafer alignment and spacing while being moved and placed in liquid. Their easily designed form helps quick chemical flow and drainage, which speeds up chemical exchange rates and improves cleaning or etching uniformity on the wafer surface.  The cassettes are available in standard sizes for 4-inch, 6-inch, and 8-inch wafers, with customization options available to fit specific substrate dimensions, slot counts, and handling requirements.

Designed for compatibility with automated wet benches and robotic wafer handling systems, Teflon Cassettes integrate easily into most semiconductor production setups. Their robust construction and cleanroom-grade finish meet the stringent demands of ISO-certified environments. All cassettes undergo thorough inspection and are pre-cleaned in ultra-pure water to meet the cleanliness standards required for advanced microelectronics production. Certificates of conformance and full material traceability can be provided to ensure compliance with quality assurance protocols.