TaC Coated Graphite Parts

Semicorex TaC Coated Graphite Parts are made of high-purity isostatic graphite and are coated with Tantalum Carbide (TaC), which provides unparalleled resistance to extreme temperatures. The TaC Coated Graphite Parts are engineered to withstand the rigorous conditions encountered in semiconductor manufacturing and are excellent at enhancing various processes crucial to the production of high-quality semiconductor products. Their exceptional heat resistance ensures reliability and longevity, even in the most challenging thermal environments.

TaC Coated Graphite Parts play a pivotal role in optimizing key semiconductor processing techniques, including diffusion processes, oxidation annealing, LPCVD and PECVD. By facilitating precise control over temperature and ensuring uniformity across substrates, TaC Coated Graphite Parts contribute significantly to improving product quality and manufacturing efficiency.

Semicorex TaC Coated Graphite Parts are engineered to meet the strict demands of semiconductor manufacturing. From enhancing diffusion processes to improving the quality and efficiency of various deposition techniques, TaC Coated Graphite Parts are indispensable assets in the pursuit of excellence in semiconductor fabrication.