TaC Coated Rings

As the professional manufacture, we would like to provide you TaC Coated Rings. Introducing the CVD Tac Coated Ring, a state-of-the-art solution for semiconductor equipment. This cutting-edge product boasts an advanced chemical vapor deposition (CVD) coating that provides exceptional durability and resistance to wear and tear.

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Product Description

As the professional manufacture, we would like to provide you TaC Coated Rings. Designed specifically for use in semiconductor manufacturing processes, the CVD Tac Coated Ring provides a high level of performance and reliability, ensuring optimal results with each use. The CVD coating offers superior protection against corrosion, making this ring ideal for use in harsh chemical environments.

This ring is manufactured with precision and attention to detail, ensuring a perfect fit for your equipment. It is also designed to be lightweight, which makes it easy to handle and install. The CVD Tac Coated Ring is made from high-quality materials that are resistant to heat, ensuring that it maintains its integrity even under high temperatures.

Parameters of TaC Coating

Projects	Parameters
Density	14.3 (gm/cm³)
Emissivity	0.3
CTE (×10^-6/K)	6.3
Hardness (HK)	2000
Resistance (Ohm-cm)	1×10^-5
Thermal Stability	<2500℃
Graphite Dimension Change	-10~-20um (reference value)
Coating Thickness	≥20um typical value(35um±10um)

The above are typical values