Silicon Cassette Boats

Silicon cassette boats made of unsurpassed high purity polycrystalline silicon or monocrystal silicon have the following advantages:

1.Ultra-low impurity contamination: 

Their materials share the same chemical composition as carried wafers, minimizing unwanted impurity ion during high-temperature processes.

2.Superb thermal stability: 

They are able to endure non-deformation and maintain precise spacing for prolonged high-temperature exposure (around 1250°C), thereby providing a stable support platform for wafers.

3.Excellent mechanical properties: 

They are more resistant to impact and are less prone to breakage when being loaded and unloaded than quartz boats.

4.Long service life: 

With no surface coating, their surface materials will not peel off even when exposed to challenging high-temperature environments for a long time.

Semicorex silicon cassette boats are small wafer support and transfer carriers that is compatible with 4-inch and 6-inch horizontal high-temperature furnaces. The integrated formed structural design avoids the splicing gap and structural weaknesses at the joints, greatly reducing the risks of cracking caused by mechanical impact, chemical corrosion or thermal stress. Silicon cassette boats are well compatible with high-temperature treatment procedures like oxidation, diffusion, annealing, and high-temperature cleaning due in large part to Semicorex's cutting-edge processing technology.

Semicorex silicon cassette boats support high-end customized adjustments for our valued customers, including aspects such as groove bar shape, groove tooth length, profile, tilt angle, and total wafer loading capacity. This tailored design guarantees that wafers are precisely arranged at fixed intervals within silicon cassette boats, effectively mitigating positional deviation and uneven heating during processing and thereby prevents damage to chip electrical performance or even complete chip failure. To ensure that customers receive high-quality products, Semicorex's silicon cassette boats must pass stringent quality inspections, including dimensional accuracy, material properties, surface flatness, overall cleanliness, and residual stress.