SiC-Coated Epitaxial Susceptors

Semicorex SiC-coated epitaxial susceptors are the essential components used in the semiconductor epitaxial growth process to stably support and fix the semiconductor wafers. Leveraging mature manufacturing capabilities and state-of-the-art production technologies, Semicorex is committed to supplying market-leading quality and competitively priced SiC-coated epitaxial susceptors for our valued customers.

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Product Description

Semiconductor substrates cannot be placed directly set on the base in MOCVD or CVD equipment during epitaxial deposition because of the impact of multiple critical factors, including gas flow direction (horizontal and vertical), temperature, pressure, substrate fixation, and particulate contamination. For this reason, the epitaxial susceptors are required to be positioned at the center of the reaction chamber in MOCVD/CVD systems to support and secure semiconductor substrates, thus preventing epitaxial growth quality degradation caused by vibration or positional displacement.

High-purity graphite is used as the matrix material for Semicorex SiC-coated epitaxial susceptors, with the silicon carbide coating deposited on their surface by the advanced CVD techniques. Semicorex SiC-coated epitaxial susceptors is the indispensable components in the epitaxial layer formation process. Their primary role is to provide a stable and controllable operating environment for the growth of epitaxial layers on semiconductor substrates, which thereby can ensure the consistency of wafer surface quality.

The characteristics of Semicorex SiC-coated epitaxial susceptors

1. Outstanding high-temperature resistance to withstand 1600℃ operating conditions.

2.High thermal conductivity, delivering rapid heat transfer to maintain uniform temperature distribution on the semiconductor substrates.

3.Strong chemical corrosion resistance to resist chemical degradation and corrosion, avoiding process contamination of substrates and epitaxial layers.

4.Superior thermal shock resistance to avoid the occurrence of coating cracking and delamination.

5.Exceptional surface flatness, fitting snugly to substrates that minimize gaps and defects.

6.Longer service life, reducing time and economic losses caused by parts replacement and maintenance.

The applications of Semicorex SiC-coated epitaxial susceptors

With multiple excellent advantages, Semicorex SiC-coated epitaxial susceptors play a pivotal role in facilitating uniform and controllable growth of epitaxial thin films and are widely applied in the semiconductor epitaxial growth process.

1.GaN epitaxial growth

2.SiC epitaxial growth

3.Si epitaxial growth