Aixtron 1x4" SiC coated graphite susceptors

Epitaxial growth of wafers is realized via MOCVD (Metal-Organic Chemical Vapor Deposition). Precisely dosed ultra-pure gases are delivered into the reaction chamber; at high temperatures, chemical reactions occur, allowing atomic-thin films to deposit on wafer substrates and build compound semiconductor epitaxial structures. As the irreplaceable core parts for MOCVD systems, SiC-coated graphite susceptors’ performance exerts a decisive impact on epitaxy growth speed and finished wafer quality.

Semicorex adopts high-purity isostatic graphite as Aixtron 1x4" SiC coated graphite susceptors’ base materials and applies a dense silicon carbide protective coating on their surface, making them serve as ideal options for demanding epitaxial process environments.

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High-quality isostatic graphite bases

Aixtron 1x4" SiC coated graphite susceptors are precisely fabricated from semiconductor-grade isostatic graphite. Boasting fine grain size and uniform internal properties, this graphite material delivers the following excellent performance, enabling Aixtron 1x4" SiC coated graphite susceptors to provide a steady carrier and heating base during wafer epitaxy processes.

1. Ultra-high material purity

2. Robust thermal shock resistance

3.  Exceptional high-temperature resistance

4.  Reliable chemical stability

5. Superior thermal conductivity

6. Isotropic properties and consistent performance in all direction

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Dense CVD SIC coating

In order to avoid reaction chamber contamination from uncoated graphite bases and extend the service life of wafer susceptors, Semicorex adopts chemical vapor deposition technology to cover a uniform SiC protective coating on the base surface, delivering superior performance listed below:

1. Enhanced corrosion resistance

The dense CVD SiC coating of Aixtron 1x4" SiC coated graphite susceptors acts as a protective barrier, which can prevents the graphite base from corrosion in rigorous epitaxial conditions.

2. Strong interfacial bonding

The CVD SiC coating is tightly bonded with the graphite base and will not easily crack or peel off even under repeated thermal cycling during the epitaxial process.

3. Prolonged service life

CVD SiC coatings can protect the graphite base from pulverization and corrosion during epitaxial growth, thus significantly extending Aixtron 1x4" SiC coated graphite susceptors' service life.

Thoughtful service and fast delivery

Semicorex features a well-experienced team ready to quickly handle customers’ inquiries and offer professional technical support. Relying on our integrated manufacturing workflows, Semicorex offers a efficient production lead time of Aixtron 1x4" SiC coated graphite susceptors typically within 45-60 days, which effectively cuts down customers’ waiting period and over project timeline.