Semiconductor Graphite Heater

Semiconductor graphite heater is a advanced heating device made of high-purity isostatic graphite material. Its excellent electrical conductivity and thermal conductivity ensures precise temperature control and uniform heat distribution for the growth and processing of semiconductor materials. When the electric current passes through the heater, it overcomes the internal electrical resistance of the graphite, converting electrical energy into heat, raising the graphite temperature and achieving heating. Precise temperature control can typically be achieved by adjusting the electric current intensity and heater resistance.

Semicorex's carefully selected high-purity isostatic graphite exhibits excellent thermal conductivity, enabling it to quickly and evenly transfer heat to every corner of the heating area, effectively preventing localized overheating.

Notably, even when exposed to extremely high-temperature conditions, like ultra-high-temperature arc ablation, high-purity isostatic graphite maintains stable physical and chemical characteristics. Intense heat would normally cause materials to melt, deform, or oxidize, but this type of graphite is able to resist those changes. This makes it well-suited for high-temperature processes in semiconductor production, including single-crystal silicon pulling and silicon carbide crystal growth.

Semiconductor graphite heater is characterized by energy efficiency. It requires no preheating, reaches the set temperature quickly, and achieves notable energy savings compared to traditional heaters. Its high thermal conversion efficiency effectively reduces energy consumption, realizing energy conservation and consumption reduction. During operation, it produces no pollutants or exhaust gases, meeting environmental requirements.

In addition, semiconductor graphite heater boasts a long service life. High-purity isostatic graphite endows them with superior mechanical strength, strong corrosion resistance, and excellent thermal shock resistance. They are less susceptible to factors such as high temperatures and chemical corrosion, allowing for an extended service life.