Rigid Insulation

Semicorex Rigid Insulation is specially designed for SiC epitaxial process, with unique assembly structure, high resistivity, spark prevention and good thermal insulation performance.The Rigid Insulation is a high-performance thermal barrier made from premium short ceramic fibers. Engineered into a hard felt structure, this Rigid Insulation material combines excellent mechanical strength with superior thermal insulation properties, making it ideal for the demanding conditions inside semiconductor manufacturing environments.

Semiconductor-grade silicon and silicon carbide usually need to be prepared in a high-temperature environment using specific instruments such as single-crystal silicon pulling furnaces and silicon carbide single-crystal growth furnaces, and there are more stringent requirements for the preparation environment. For example, the maintenance of the preparation temperature and the reduction of external impurity interference. For this reason, a thermal insulation felt woven from high-purity carbon fiber came into being, and with its advantages of easy molding, not easy to break, strong thermal insulation performance, and low impurity content, it became a veritable "warm clothing" before the birth of semiconductors.

Using PAN-based carbon fiber felt and viscose-based carbon fiber felt as raw materials, Rigid Insulation is prepared through processes such as soaking, bonding, curing, heat treatment, and machining. It is widely used in high-temperature equipment such as powder metallurgy industrial furnaces, vacuum sintering furnaces, photovoltaic single crystal furnaces, polycrystalline furnaces, and semiconductor crystal growth furnaces. It has good compressive resistance and excellent thermal insulation performance. Compared with soft felt, Rigid Insulation has the advantages of easy installation, stable size, low thermal insulation attenuation, and long service life.