Quartz Liquid Storage Tank

Semicorex Quartz Liquid Storage Tank is a purpose-built container for semiconductor wet clean applications where liquid handling requires an extraordinary level of cleanliness and stability of materials. Primarily, this tank is used for collecting waste or residual liquids from wafer cleaning applications. It is invaluable for process productivity and contamination control. During a wet clean process, semiconductor wafer rinsing involves large volumes of ultrapure water or chemical reagents that become waste liquid at the end of the rinsing. Additionally, residual liquid after rinsing must be collected because it has potential trace impurities, or valuable chemical constituents that must not go down the drain. Waste liquid must also be collected when coating steps are performed such as photoresist applications, where extra residues or waste chemical has to be collected. Thus, the quartz liquid storage tank has the perfect deliverables to provide high purity, chemical compatibility, and low contaminant properties.

The tank is made of high-purity fused quartz that is very resistant to strong acids, alkalis, and solvents regularly used in semiconductor cleaning and lithography. Whether a conventional container, quartz gives the pieces liquid material the best chance of no secondary contaminant exposure, leaching, or unwanted ion exposure. One of the leading aspects of the Quartz Liquid Storage Tank is the ability to support analytical workflows in semiconductor fabs, as the residual liquids collected in a quartz vessel can be used in downstream processes such as impurity detection, contamination analysis and chemical recycling. Inherent to the properties of quartz, it can safely contain residual fluids and allow for visual assessment without risk of interaction given its inertness and transparency, in addition to its thermal stability, which allows for any fluid in the tank to be mildly accelerated to any process temperature without risk of degrading or impacting the fluid. That said, the Quartz Liquid Storage Tank is designed for both waste collection and short-term storage before they are transferred or treated.

Every detail of process contamination control matters, especially as advanced device manufacturing nodes shrink and cleanliness parameters become more stringent. The Quartz Liquid Storage Tank guarantees fab operators are confident that waste management doesn't become a source of secondary contamination. By containing residual cleaning solutions or excess process liquids, it prevents the upstream and downstream workflows from being validly effected. In addition, the tank supports a fab’s sustainability goals, as collected liquids can be processed for reagent purification and reuse, thus using another less chemical-intensive process and resulting in less environmental load overall.

From a practical standpoint, the design of the Quartz Liquid Storage Tank allows it to be easily incorporated into wet cleaning hardware and chemical management systems. The form factor can be tailored to existing tool configurations. Precision fabrication methods ensure the Round dimensions, and that the smooth interior surface will easily transport & store all liquids in your semiconductor fab environment. A non-porous quartz structure will prevent the absorption of contaminants, and allow cleaning of the tank, making it capable for re-use, unlike conventional plastic containers operating in chemical controlled environments at significant volume operations.

The bottom line, the Quartz Liquid Storage Tank is specially designed for importance in all of semiconductor wet cleaning and coating applications. By creating the best possible material purity, chemical resistance and contamination free liquid storage in a semiconductor operational facility, fabs are able to effectively control their process with little to no oversite of contamination. Whether a fab is using the tank to receive direct waste collection, for the recovery of a reagent, etc., or for impurity analysis, the history of critical steps in the process remain in original state without compromising operation. When you are looking to maximize yield, minimize risk to your work process to loss of stability, and maximize efficiency of chemical management of byproducts, contamination free quartz is the only choice which offers reliable performance with all your wet cleaning.