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The new energy vehicle industry is quickly advancing toward high-quality growth, becoming an eagerly awaited part of the global supply chain. The automotive power module acts as the "power center" of new energy vehicles, responsible for converting the battery's DC power into the AC needed to operate the motor. It also manages the motor's speed and torque, directly affecting the vehicle's performance and energy efficiency.

Alumina ceramic components have excellent properties such as high hardness, high mechanical strength, super wear resistance, high temperature resistance, high resistivity, and good electrical insulation performance.

There are two types of epitaxy: homogeneous and heterogeneous. In order to produce SiC devices with specific resistance and other parameters for different applications, the substrate must meet the conditions of epitaxy before production can begin. The quality of the epitaxy affects the device's performance.

A critical step in the fabrication of n-type GAAFETs involves the high-selectivity etching of SiGe:Si stacks prior to the deposition of inner spacers, generating silicon nanosheets and releasing channels.

Crystal growth is the core link in the production of Silicon Carbide substrates, and the core equipment is the crystal growth furnace. Similar to traditional crystalline silicon-grade crystal growth furnaces, the furnace structure is not very complex and mainly consists of a furnace body, a heating system, a coil transmission mechanism, a vacuum acquisition and measurement system, a gas path system, a cooling system, a control system, etc., among which Thermal field and process conditions determine the quality, size, conductive properties and other key indicators of Silicon Carbide crystals.