Products

Semicorex Fused Quartz Insulating Rings are the critical insulating components for semiconductor equipment used in etching, deposition, and plasma processing, primarily used for electrode isolation, electric field shielding, structural insulation, and gas flow confinement. Choosing Semicorex, choosing the ideal quartz insulating solutions for high-end semiconductor manufacturing.

Specifically designed for high-end semiconductor manufacturing processes, such as high-temperature thermal processing, thin-film deposition, wet processes and vacuum processes, Semicorex quartz wafer susceptors are the premium wafer handling components to ensure stable and durable wafer processing under harsh semiconductor manufacturing environments. Choose Semicorex, choose the ideal wafer carrier solution.

Semicorex quartz focus rings are the high-performance ring parts specifically designed for semiconductor dry processes, featuring high precision, robust functionality and consistent performance. Semicorex quartz focus rings are the ideal option for advanced semiconductor manufacturing and are widely compatible with various high-end process equipment like plasma etching machines, reactive ion etching cavities and ICP etching cavities.

Semicorex Quartz Inner Furnace Tubes are the premium quartz components well-suited for semiconductor wafer processing processes like diffusion, oxidation, annealing and LPCVD deposition. Specifically designed for high-end processes, Semicorex quartz inner furnace tubes are compatible with the challenging process environments with high-temperature, high-vacuum and corrosive atmospheres. Partnering with Semicorex to obtain the ideal quartz solutions.

Semicorex Fused Quartz Wafer Boats are the essential wafer handling tools designed for batch wafer supporting, positioning and transferring during challenging wafer processing environments with high temperature, high vacuum and high corrosion. Choosing Semicorex secures the ideal quartz components for high-end wafer processing processes like diffusion, oxidation, annealing and thin film deposition.

Semicorex quartz sealing flanges are high-performance vacuum sealing joints engineered for high-end semiconductor vacuum equipment, high-temperature chambers and gas piping systems, which fully meet the high-precision, high-cleanliness and high-stability production line requirements of advanced semiconductor manufacturing. Choosing Semicorex quartz sealing flanges, securing the ideal quartz solutions for your applications