Semicorex high-purity fused quartz crucibles, made of semiconductor-grade high-purity quartz materials, are the critical containers in the cutting-edge semiconductor manufacturing. Semicorex high-purity fused quartz crucibles are the ideal quartz solutions designed specifically for the single-crystal silicon growth process in the high-temperature single-crystal furnaces.
The quartz crucible is commonly installed inside the graphite crucible and placed in the core area of the high-temperature single-crystal furnace. It works together with other thermal field components, such as the heater, the insulation cylinder, and the guide tube, to provide a stable and contamination-free environment for high-quality single-crystal growth. As the indispensable carriers for holding polycrystalline silicon raw materials, Semicorex high-purity fused quartz crucibles can endure the severe high-temperature and high-corrosive operating conditions, thus ensuring uniform heating of the silicon melt and orderly crystal growth.
Their internal content of unwanted metallic impurities like Al, Ca, Cr, Cu, Fe are controlled at an extremely low level.
|
Trace Elements (Unit: ppm) |
|||||||||||||
|
Code |
Criteria |
Al |
Ca |
Cr |
Cu | Fe | K | Li | Mg | Mn | Na | Ti | Zr |
|
PQ181E |
Typical |
13.0 |
0.50 | <0.05 |
<0.05 |
0.10 | 0.10 | 0.30 | 0.05 | 0.05 | 0.10 | 1.30 | 1.00 |
|
Maximum |
19.0 | 1.00 | 0.10 | 0.10 | 0.50 | 1.00 | 1.00 | 0.20 | 0.20 | 1.00 | 2.00 | 2.00 | |
|
PQ181EH |
Typical |
8.0 | 0.60 |
<0.05 |
<0.01 | 0.10 | 0.10 | 0.20 | 0.05 | 0.05 | 0.10 | 1.30 | 1.00 |
|
Maximum |
10.0 | 1.00 | 0.10 | <0.10 | 0.50 | 0.50 | 0.50 | 0.20 | 0.20 | 0.50 | 2.00 | 2.00 | |
Their maximum continuous operating temperature can be up to 1100 degrees Celsius.
Low reactivity with Si melt and no chemical by-products generated.
Their diameters range from 14 inches to 36 inches, and customization is supported.
Their outer opaque layer contains multiple bubbles for uniform heating, and their inner transparent layer has low bubble content to prevent crystal defects.
Semicorex high-purity fused quartz crucibles feature exceptional performance, dependable durability, and cost-effective price and are extensively applied in the following fields.
Semicorex high-purity fused quartz crucibles can be used to produce the high-quality silicon that satisfies the stringent requirements of high-end chips for purity, defect density, and electrical properties.
Semicorex high-purity fused quartz crucibles also can be applied to produce solar-grade single-crystal silicon wafers, which helps improve the photoelectric conversion efficiency of solar cells.