Poly-Si Slotted Rings

Poly-Si slotted rings are commonly installed in the reaction chamber of advanced semiconductor etching equipment. They operate synergistically with silicon parts, including silicon focus rings, silicon outer rings, and silicon showerheads. These parts can create a stable and optimal reaction environment for etching process, ensuring excellent the etching precision and process consistency.

Functions of Semicorex poly-Si slotted rings

1. Semicorex poly-Si slotted rings are equipped with multiple evenly distributed slots that serve as gas passages, which allow smooth exhaust of process gases after reaction.

2. Semicorex poly-Si slotted rings are able to achieve excellent plasma control, offering reliable protection for the reaction chamber of semiconductor etching equipment.

3. Semicorex poly-Si slotted rings can help adjust the electric field and chamber pressure, thus preventing instability from affecting etching process consistency.

High-standard material selection

Semicorex poly-Si slotted rings are manufactured from high-quality polycrystalline silicon with a purity level of over 99.9999%, which endows them with superior properties as follows.

1. Ultra-high purity and extremely low impurity content.

2. Exceptional plasma corrosion resistance.

3. Favorable electrical properties, with resistance uniformity: RRG ≤ 5%, low res. (<0.02), middle res. (1–4), and high res. (70–90).

Manufacturing capabilities and quality control

Equipped with advanced machining equipment and an experienced technical team, Semicorex strictly controls each production process and offers high-quality and well-matched poly-Si slotted rings to our valued customers. In additional, Semicorex conducts strict control over dimensional measurement, resistivity testing, and visual inspection on the finished poly-Si slotted rings to ensure them free from defects such as chips, scratches, cracks, and stains.