Ceramic Vacuum Chuck

Ceramic vacuum chucks are made of porous ceramic materials with uniform pore size distribution and internal interconnection. After grinding, the surface is smooth and delicate with good flatness. They are widely used in the manufacturing of semiconductor wafers such as silicon, sapphire, and gallium arsenide.

A porous ceramic vacuum chuck is a platform that secures workpieces using the principle of vacuum adsorption. The vacuum transfer portion of the chuck is a porous ceramic plate, which fits into a countersunk hole in the base. Its perimeter is bonded and sealed to the base, which is crafted from precision ceramic or metal. By combining a metal or ceramic base with a special porous ceramic, and by designing precise internal air passages, negative pressure is applied to the chuck, allowing the workpiece to be smoothly and securely attached to the chuck.

Ceramic Vacuum Chuck vs. Traditional Metal Chuck

Traditional metal chucks have uneven suction force, are prone to deformation on thin materials, lack anti-static properties, and are prone to wear and tear due to their low hardness. Ceramic vacuum chucks, on the other hand, are suitable for thin parts, offer anti-static properties, and are wear-resistant and corrosion-resistant.

The structure of ceramic vacuum chuck

The vacuum suction cup is generally composed of two parts, the main body and the base. The main body is the porous ceramic disc, which is the main functional area. It is generally made of porous ceramics, such as porous silicon carbide, porous alumina and other materials. Different materials and purities correspond to different colors. There is a passage design inside to add air pressure, so that negative pressure appears on the surface of the chuck, adsorbing the object. The base is mainly used to support the main body. Due to the characteristics of the material, porous ceramics are relatively brittle and easy to break. Adding a base is beneficial to the use of the chuck. The base is generally made of stainless steel, aluminum alloy, alumina, silicon carbide ceramics, etc. Different materials will have different flatness and weight.

Semicorex offers high-quality customized vacuum chucks. If you have any inquiries or need additional details, please don't hesitate to get in touch with us.

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