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Graphite products for vacuum furnace

2025-07-21

Graphite products are key and indispensable components in the semiconductor manufacturing process, including isostatic graphite, porous graphite, felt, etc. Common types of graphite products for vacuum furnaces:

1. Graphite heating elements

Use: As the core heating element of the vacuum furnace, it provides a uniform high-temperature environment.

Type: graphite rods, graphite tubes, graphite plates, graphite belts, etc.

Features: high temperature resistance (up to 3000°C), oxidation resistance, and stable resistivity.


2. Graphite insulation layer (insulation layer)

Use: reduce heat loss and improve temperature uniformity in the furnace.

Type: graphite screen, graphite lining, graphite felt, graphite hard felt, etc.

Features: low thermal conductivity, light weight, high temperature resistance.


3. Graphite crucible

Use: used for smelting metals, crystal growth or high-temperature chemical reactions.

Type: high-purity graphite crucible, isostatic graphite crucible.

Features: high purity (low ash content), good thermal shock resistance.


4. Graphite support and connectors

Use: fix heating elements or carry workpieces.

Type: graphite bolts, graphite nuts, graphite brackets, etc.

Features: high strength, high temperature deformation resistance.


5. Graphite electrode

Use: used for current conduction in vacuum furnaces.

Type: cylindrical, square electrodes.

Features: low resistivity, high mechanical strength.


6. Graphite boats and carriers

Use: carry workpieces for high temperature treatment (such as sintering, annealing).

Type: graphite box, graphite plate, graphite rack, etc.

Features: high temperature resistance, chemical corrosion resistance.





Semicorex offers high-quality graphite products. If you have any inquiries or need additional details, please don't hesitate to get in touch with us.


Contact phone # +86-13567891907

Email: sales@semicorex.com


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