Graphite Chuck

Semicorex graphite chuck is engineered from specialized graphite, recognized for its outstanding thermal and chemical resistance. A unique example of such a graphite chuck that was specifically engineered from that form of graphite because it is known for its very high resistance to chemicals and to heat. This makes the chucks very long-lasting and they will perform in the most difficult conditions under use in Chemical Vapor Deposition (CVD) or plasma etching or even in a high-temperature furnace. As such, high purity with very low impurities would already mean that they would not cause contamination during production of polysilicon. They are capable of bearing temperatures far above 2000°C without any notable deformation since they are very stable through increased temperature. In addition, they also have superior resistance to most chemicals and therefore will survive under very difficult conditions, like in Hydrochloric Acid (HCl) or Silicon Tetrachloride (SiCl4). High mechanical strength means yet that the chuck is able to retain its form even when subjected to a continuous load.

Graphite chuck is critical in wafer processing and the growth of crystals; they play a primary role in all manufacturing at any stage, like chemical vapor deposition (CVD), where they ensure uniform silicon deposition. During slicing and polishing, they deliver stable support for wafer cutting and surface finishing. In thermal processing, they act as a heat-resistant base for silicon wafer annealing and doping processes, significantly enhancing the efficiency and quality of the production line.

How do we ensure the uniformity of performance of our graphite?

First, carbonization. Our furnace has only 115 cubic meters. Our technical team will test the temperature field of graphite products in different areas of each furnace. In the low temperature state (0-200°) when the temperature starts to rise, we will control it at about ±10°, and in the high temperature state (above 600°), we will control it at ±1°. We will not only test the temperature field between different graphites, but also test the surface and internal temperature of each piece of graphite material, and control it at ±3°. We test 8 temperature points in each furnace in the carbonization furnace.

The second is graphitization. Taking 500 kg as an example, we will also test 8 temperature points. Samples are randomly inspected at any position of the graphitized product for destructive testing. After destruction, 24 points are tested. Tests are performed separately from the XYZ axis to ensure its uniformity. Most companies in the industry will only test the X axis or at most the XY axis.

General manufacturers only test 6-8 points, and the better ones test 12 points, while we test 24 points.

Semicorex Graphite Chuck is an indispensable solution for polysilicon manufacturers seeking high-performance, reliable, and cost-effective tooling. With advanced material properties and precision engineering, our product enhances the efficiency and quality of silicon wafer production in the solar industry. For more information or custom specifications, please contact us today.