Alumina ceramic vacuum chucks

Alumina ceramic vacuum chucks are commonly placed in the core area of semiconductor equipment processing zone, responsible for supporting and fixing the semiconductor wafers. They are connected to the vacuum pumps and can tightly adsorb semiconductor wafers onto the surface of alumina ceramic vacuum chucks by using vacuum adsorption principle. In actual operation, the vacuum pumps extract air from between the wafer and chuck, creating a vacuum environment that firmly holds the wafer in position. This ensures stable wafer positioning during processing and effectively reduces machining errors caused by wafer displacement.

To generate sufficient adsorption force to fix the semiconductor wafer, the alumina ceramic vacuum chuck needs to adhere tightly to the wafer surface. Since insufficient adsorption force will result in a failure to maintain vacuum condition, thereby causing the wafer to detach or shift. This places stringent requirements on the surface flatness of the alumina ceramic vacuum chucks to avoid such problems at the source. Their surface must be precisely mechanically polished to achieve the required flatness to ensure the expected adsorption effect.

From an operational perspective, Semicorex’s alumina ceramic vacuum chucks are critical components in achieving automation of contemporary semiconductor manufacturing. They can facilitate the smooth progress of automation, allowing for the accurate pick-up, placement, alignment, and processing of wafers. The well-designed structure and appearance of alumina ceramic vacuum chucks allow for rapid air passage, which achieves efficient vacuum adsorption and release and prevent deformation or damage to the wafer surface caused by unfit adsorption force. Moreover, Semicorex utilizes lightweight alumina ceramics to reduce the overall weight of the alumina ceramic vacuum chucks. This material selection facilitates the installation and operation of equipment, thus significantly enhancing operational efficiency.

With so many remarkable performance, Semicorex’s alumina ceramic vacuum chucks are widely used in semiconductor manufacturing industry such as wafer thinning, dicing, grinding, polishing, photolithography, etching and other processes to improve processing accuracy and yield.